对精制稀有气体工艺中几处电加热器的控制要求、原理、功能进行了详细介绍，并举例说明了根据工艺流程的不同控制要求对加热器进行的设置和改进。%The control requirement, principle and functions of several electric heaters in refined rare gas production process are introduced in detail; set up and improvement of the heater according to different control requirements of the process flow are also explained with examples.
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