微重力传感器中光学薄膜的有限元应变分析

摘要

The sensitivity of the surface of optical film to micro-gravity is a key factor in designing a micro-gravity optical sensor. We study the variation of the micro-gravity with the slope of the reflection surface of optical film. Through orthogonal experiments, we analyze the relationship between the slope and the radius, thickness and mate- rials of the optical film. Taking into account the experimental results, we amend the slope formula of the round opti- cal film under concentrated strain. The theoretical calculation and the ANSYS analysis show that there is a linear relationship between the micro-gravity of the optical sensor and the slope of the optical film and that the sensitivity of the optical film to the micro-gravity increases with the increasing radius and with the decreasing thickness and e- lastic modulus of the optical film.%光学薄膜表面对微重力的敏感性是微重力光学传感器设计的关键问题。本文中研究了薄膜反射面斜率与微重力之间的变化关系,通过正交试验设计,分析了光学薄膜的材料、半径、厚度与薄膜反射面斜率之间的关系;并结合实验结果对圆薄膜在集中力作用下表面斜率公式进行了修正。通过理论计算以及ANSYS有限元分析发现：薄膜反射面斜率与微重力之间有良好的线性关系;薄膜的微重力敏感性随薄膜半径增大而增大;且随着薄膜厚度和弹性模量的减小而提高。