Fuzzy-PID复合控制在单晶硅等径生长中的应用

摘要

It is difficult to apply general PID control to the equipment ofmonocrystalline silicon growth with the nonlinear and great pure hysteresis characteristics.With some real-time programming methods,a composite control model combining PID with Fuzzy control is introduced and then received satisfactory control effects in Windows system.%单晶硅晶体生长炉具有非线性和大纯滞后的特点，应用常规PID控制难以实现有效控制。采用Fuzzy-PID复合控制模型，在Windows平台下实现了有效的控制，并给出实时控制的程序设计方法。