COMPOSITE HEAT INSULATION STRUCTURE FOR MONOCRYSTALLINE SILICON GROWTH FURNACE AND MONOCRYSTALLINE SILICON GROWTH FURNACE

摘要

Disclosed is a composite heat insulation structure for a monocrystalline silicon growth furnace, comprising a supporting layer and a laminated structure on the supporting layer. The laminated structure comprises one or more first refractive layers and one or more second refractive layers which have different refractivity and are disposed alternately. Also disclosed is a monocrystalline silicon growth furnace in which the composite heat insulation structure is disposed on a heat shield. When disposed on a heat shield to be applied to the monocrystalline silicon growth furnace, the composite heat insulation structure can improve ability of the heat shield to reflect heat energy, reduce heat dissipation of silicon melt, and play a role of heat insulation on a heat field, thereby improving the quality of the heat field to improve the quality and yield of monocrystalline silicon.