基于图像配准的扫描电镜图像误差校正

摘要

Scanning electron microscopy (SEM) is an important equipment to characterize dimension and morphology of nanomaterials.For SEM images,the image distortion is easily produced under the influence of external surroundings.In order to correct the image error,a method for SEM image distortion elimination based on image registration is suggested.The feature-based image registration technique is adopted in the method.The Speeded up robust features (SURF) algorithm is used for feature point extraction and vector description.Then the image transformation model of spatial distortion is established.Thereby the true image can be restored.Experimental results show that this method can be used to effectively correct SEM image error,and improve the measurement accuracy of the scanning electron microscopy.%扫描电子显微镜(SEM)是表征纳米材料和纳米结构的重要测量仪器.扫描电镜在环境的影响下会产生图像失真,尤其在微纳尺度范围内会产生较大的测量误差.为了修正SEM图像的测量误差,提出基于图像配准的图像误差校正方法.该方法采用基于特征属性的图像配准技术,通过加速稳健特征算法提取图像特征点并构造描述矢量,建立失真图像的空间变换模型,从而恢复样品的真实图像.实验证明该方法能够有效地校正扫描电镜图像,提高样品形貌观测的准确性和精度.