显微CT精密运动平台定位精度优化

摘要

为提高显微CT精密运动平台定位精度,以精密运动平台Z轴载物台为执行机构,提出直接对永磁同步电机轴到Z轴载物台进行控制的全闭环伺服控制系统并建立电机轴到Z轴载物台的数学模型.分析矢量控制技术,研究无速度传感器技术对速度的估计,搭建电机矢量控制无速度观测器仿真模型,验证其可行性.位置环采用线性自抗扰技术进行优化,通过MAT-LAB仿真,验证了线性自抗扰技术可以提高位置环的定位精度.%To improve the positioning accuracy of the micro-CT precision motion platform,this paper uses its Z-axis stage as exe-cuting mechanism,puts for ward the full closed loop servo control system to direcfly control the stage of the permanent magnet syn-chronous motor axis to Z-axis and establishes the mathematical model of the motor shaft to Z-axis stage,analyzes the vector con-trol technology,researches on the speed sensor technology which is used to estimate the spped,and builds the simulation model of the observer's apparatues with the motor vector control, which is used to verify its feasibility, then uses the MATLAB software to verify that the linear ADRC technology can be used to improve the position ring precision.