Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof

摘要

The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement “jitter” caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.