从GFP2011看硅光子学的进展

摘要

半导体硅材料不仅是一种电子材料,也是一种合适的光子材料.成熟的微电子加工工艺更为硅光子学提供了坚实的技术基础.根据第八届Ⅳ族光子学国际会议的信息,文章综述了硅基光波导技术特别是SOI光波导技术研究的最新进展,着重介绍了光调制器、亚波长光栅、混合集成、封装以及波导加工等方面的新理念与新方法.%Semiconductor silicon is a kind of electron material, and is also a kind of appropriate photon material. Mature micro-electronics processes provide solid foundation for silicon photonics. The recent progress of Si-based optical waveguide technology especially the SOI (silicon-on-insulater) technology reported on GFP2011 has been overviewed. The modulator,subwavelength grating,hybrid integration,packaging and waveguide new process are introduced in detail.