二氧化钒薄膜的制备和应用研究新进展

摘要

VO2 will change from semiconductor to metal phase,which is a solid to solid phase -transition,when its temperature is about 68 ℃,and its optical and electrical properties will mutate after the phase -transition.This fea-ture makes the VO2 thin films to be widely studied in fields of infrared smart window,optical switch devices,laser pro-tective materials,adaptive stealth materials,etc.Preparation methods of VO2 thin films include magnetron sputtering, pulsed laser deposition,sol -gel,metal thermal evaporation method,etc.The ideal preparation parameters are the fo-cus of current research.Preparation methods and application status of VO2 thin film are summarized,which gives refer-ence for further studies in the properties and applications of VO2 thin film.%VO2在68℃左右时发生半导体—金属态的固－固相变，且相变前后光学和电学性能发生突变，该特性使 VO2薄膜在红外智能窗、电致光开关器件、激光防护材料、自适应隐身材料等领域受到广泛研究。制备 VO2薄膜的方法包括磁控溅射法、脉冲激光沉积法、溶胶－凝胶法、金属热蒸发法等，理想的制备参数是当前研究的重点。本文总结了近年来 VO2在制备方法和应用发展上的研究现状，对进一步深入研究 VO2薄膜的各项性能及应用具有借鉴意义。