金属有机沉积涂层导体 La2 Zr2 O7缓冲层长带制备

摘要

In this paper, the sample of long length baseband of La2 Zr2 O7 (LZO) buffer layer with pyrochlore structure was fabricated on the NiW baseband of bi-axial texture by using of the roll to roll mode and the metal organic deposition ( MOD) technology, and X ray diffraction (XRD) and atomic force microscopy (AFM) were used to analyze the texture and surface mor-phology of the short length samples extracted from the different positions of long length baseband of buffer layer. The result indicates that the LZO film with good c axis texture and smooth sur-face is obtained. However, the texture sharpness of the long length baseband samples is less than the texture degree of the static short length sample, and we can think that in the heat treat-ment process, the walking speed of baseband that influencing the heating rate and the time of heat treatment in constant temperature is the key factor to obtain the long-length baseband buff-er layer sample with good performance.%采用辊到辊方式利用金属有机沉积(MOD)技术在双轴织构的 NiW 合金基带上制备了烧绿石结构的 La2 Zr2 O7(LZO)缓冲层长带样品，利用 X 射线衍射(XRD)和原子力显微镜(AFM)对长带样品不同部位截取短样的织构和表面形貌进行了分析。结果表明，已经制得了具有良好 c 轴织构且表面光滑的 LZO 膜。然而长带样品的织构锐利度小于静态短样的织构度，可以认为，热处理过程中影响升温速率以及恒温热处理时间的走带速度是获得高质量长带缓冲层样品的关键因素。