复合热释电薄膜红外探测器的制备和性能测试

摘要

为解决热释电薄膜红外探测器中的热损失问题，引入了复合热释电薄膜的概念．它利用多孔二氧化硅具有的低热导率特点，有效地减少了热量从热释电层向衬底的热扩散．利用溶胶-凝胶和金属有机物热分解等工艺制备的复合热释电薄膜红外探测器，在温度为420K、频率为10Hz时，电压响应率约为1400V／W，探测器的星探测率D（420，10，2）为9.3×107cm.Hz1／2／W．%In order to reduce the thermal dissipation from the pyroelectric film to the substrate and meet the needs of integration with silicon, the multi-layer pyroelectric thin film (MPTF) was introduced. It is mainly composed of pyroelectric sensitive layer-lead titanate， thermal isolating layer-porous silicon dioxide film, and the buffer layer-dense silicon dioxide film. A pyroelectric measuring system was built to measure the infrared response of the detector. The voltage response and the specific detectivity of the detector were also given.