新型永磁隔振器的隔振性能分析与实验研究

摘要

Vibration isolator is a key component to suppress undesirable vibrations in optical tests,semiconductor manufacturing and precise measurements.It can isolate disturbances coming from a mechanical device itself or an external source.With the rapid development of the significantly enhanced properties of rare-earth permanent magnets,studying a vibration isolator characterized by a strong magneto-elastic force becomes a hot topic in recent years.More and more engineers and researchers are attracted to develop a type of novel magnetic suspension vibration isolator.Here,a new type of permanent magnet vibration isolator was proposed.Then,a parametric analysis for the isolator based on an analytical model of axial magnetic force and stiffness was performed.The sizes of magnetic rings were determined.The vibration isolation performance of the isolator was analyzed.The results showed that it is possible to realize low-frequency vibration isolation when the isolator reaches the maximum load bearing capacity with the lowest axial stiffness in theory.Finally,for a permanent magnet vibration isolator,its vibration isolation test table was constructed.The dynamic characteristics of the isolator were calculated and tested,respectively.The results indicated that there is a good agreement between calculation and test results; the isolator can realize low-frequency vibration isolation with its maximum load bearing capacity.%在超精密加工、IC制造、光学、高端的物理及化学试验中,隔振器已经成了许多设备的一个关键部件,隔离来自地面和设备内部的振动.随着稀土永磁材料的迅速发展,永磁隔振器已成为国内外研究的热点之一.本文将采用环形永磁体提出了一种新构型的永磁隔振器；根据环形永磁体的磁力和刚度的解析模型对隔振器的隔振性能进行参数化分析,确定了该隔振器磁环的结构参数.作为新型永磁隔振器的试验研究,搭建了永磁隔振试验台,通过理论计算和试验证实了该磁浮隔振器在其最大承载能力时具有良好的低频隔振性能.