^pSemiconductor;
Manufacturing;
Corporation,;
Shanghai;
201203,;
China;
^pInstitute;
of;
Microsystem;
and;
Information;
Technology,;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
20050,;
China;
^pUniversity;
of;
the;
Chinese;
Academy;
of;
Sciences,;
Beijing;
100049,;
China;