同质集成光源、光波导和光电探测器的可见光双工通信芯片

摘要

A full duplex communication system using visible light on a single chip is designed,fabricated and characterized.Both the suspended p-n junction InGaN/GaN multiple quantum well diodes (MQWDs) and the suspended waveguides are obtained on a GaN-on-silicon platform by wafer-level processing.Two suspended p-n junction InGaN/GaN MQWDs that can both emit and detect light simultaneously are connected using suspended waveguides to form an in-plane visible light communication (VLC) system.The light emitted from one suspended p-n junction InGaN/GaN MQWD can induce a current in the device located at the other end of the waveguide via in-plane light coupling,thus leading to full duplex communication using visible light.The proof-of-concept in-plane VLC system paves the way for the implementation of a full duplex communication system operating at the same frequency using visible light on a single chip.%文中设计、制备并表征了同质集成的可见光双工通信芯片.采用硅衬底剥离和悬空氮化物薄膜背后减薄技术,在硅衬底GaN晶圆上制备了同质集成悬空p-n结InGaN/GaN多量子阱二极管(Multiple-Quantum-Well Diode,MQW-diode)和悬空波导的光子芯片.利用悬空p-n结InGaN/GaN MQW-diode可以同时发光和光探测的物理特性,将两个InGaN/GaN MQW-diode同时作为收发端,发出的调制光耦合进悬空光波导进行传输,并最后被另一个收发端接收,叠加信号可以通过自干扰消除法进行提取处理,实现芯片内可见光双工通信.这种同质集成光源、光波导和光电探测器的可见光通信芯片为发展高速同频同时全双工可见光通信芯片奠定了器件基础.