低镜面反射硅镀膜玻璃的微结构调制

摘要

Effects of the quantity, size and distribution of micro crystalline grains in silicon films on the mirror reflection f silocon-coating glass were investigated, through the reflectivity, transmissivity measurements and high resolution microscopy(HREM) analysis. The crystalline grain can be modulated in the heat treatment processing, and a c-Si-a-Si film distributed with large amount of silicon crystalline grains is obtained. The dimension of silicon crystalline grains is between tens to hundreds of nanometer, leading to the increase of scattered reflection for visible incident lights and effective reduction of mirror reflection in duced light-pollution.%通过反射率、透射率参量测试和高分辨电镜分析，研究了硅薄膜中微晶粒数量、尺寸和分布对镀膜玻璃镜面反射效果的影响。发现通过一定的热处理工艺可以调整硅膜中的晶粒状况，得到硅微晶粒数量众多、分布弥散且晶粒大小在数十至数百纳米的硅／非晶硅复合薄膜，使入射光产生漫散射进而有效降低镜面反射所造成的光污染。