电子束蒸镀纳米TiO2薄膜结构、相组成及亲水性研究

摘要

The nano TiO2 films were prepared on glass and Si 〈100〉substrates by electron beam evaporation. The effect of substrate temperature and annealing temperature on the microstructure,phase composition and hydrophilic properties of the TiO2 film were investigated.The results showed that,with the substrate tempera-ture from 40 to 240 ℃,the structure of TiO2 films fabricated on glass substrate was amporphous,while that prepared on Si 〈100〉substrate was rutile,and the above two kinds of TiO2 films had poor hydrophilic proper-ties.The annealing temperature had a remarkable effect on the phase composition and hydrophilic properties of the TiO2 films.After 550 and 650 ℃ annealing treatment,the phase composition of the TiO2 film prepared on glass was changed to single anatase phase,and they had very good hydrophilic properties.After 550-950 ℃ an-nealing treatment,the phase composition TiO2 film prepared on Si 〈100〉was changed to mixed rutile and ana-tase phase,and the content of anatase phase increased.Its hydrophilic properties got better with increasing an-nealing temperature with substrate temperature of 240 ℃,which get worse when the substrate temperature was 40 ℃.%利用电子束蒸镀技术在石英玻璃和单晶 Si〈100〉上制备了纳米 TiO2薄膜,研究了衬底温度和退火温度对其结构、相组成和亲水性能的影响。结果表明,衬底温度为40~240℃时,石英玻璃上制备的薄膜为无定型TiO2,单晶 Si〈100〉上制备的薄膜为弱结晶性的金红石TiO2,两类薄膜的亲水性均很差。退火温度显著影响薄膜的相组成及亲水性能。石英玻璃上不同衬底温度制备的 TiO2薄膜经550,650℃退火后均转变为锐钛矿 TiO2,具有很好的亲水性能。单晶 Si〈100〉上不同衬底温度制备的 TiO2薄膜经550~950℃退火后,均由金红石和锐钛矿 TiO2混晶组成,且随退火温度升高,薄膜中锐钛矿 TiO2含量逐渐增加；随退火温度升高,衬底温度为40℃时制备的 TiO2薄膜的亲水性能逐渐降低,而衬底温度为240℃时制备的TiO2薄膜的亲水性能逐渐增强。