基于光反射传感器的微结构运动参数测试方法

摘要

针对现有MEMS微结构运动参数测试算法复杂、实验条件苛刻的问题,提出一种非接触式光电测试方法,采用高精密光反射型传感器进行信号探测,经信号处理后获得待测参数.实际测量表明:该方法的实测分辨力优于100 μm,可对引信的微钟表机构、微滑块机构等的运动参数进行测试,结构简单,成本低廉,适用于引信微机构运动特性的测量.%The present measuring methods of MEMS micro-structures motion parameters have the problems of complex algorithm and harsh experimental conditions. In this paper, a non-contact photoelectric measuring method was proposed. The method applied a high precision optical reflective sensor to detect the signal,and the under testing parameters were obtained from the processing circuit. Actual measuring results showed that the resolution of the method was better than 100 /tm, which could detect the motion parameters of fuzes1 micro clock mechanism and micro slider mechanism,etc. This method was of simple structure and low cost characteristic,and appropriate for measuring the motion characteristics of fuze micro-mechanism.