MEMS环形谐振陀螺的结构设计与振动特性分析

摘要

针对环形谐振陀螺谐振结构特性参数相同、检测灵敏度高、温度与抗干扰特性好等特点,提出了一种新颖的S形挠曲支撑梁的电容式环形谐振陀螺.其环形谐振子的刚度系数、固有频率等振动特性参数是陀螺结构优化、模态控制、驱动与检测电路设计的主要理论参数.为了得到该陀螺精确的谐振子特性参数,基于角度敏感原理、谐振结构的材料力学性能与机械振动特性,推导了谐振结构的等效刚度系数与固有频率的理论模型,并且分别进行了有限元仿真分析与样机频率特性测试.结果表明该理论模型计算的固有频率与有限元分析的误差为7.0820%,与样机实际测试的误差为3.9035%,证明了理论模型的正确性,为该陀螺的进一步研究提供了理论依据.%A novel capacitive vibrating ring gyroscope with S-shape flexure supporting springs is proposed in accordance with the characteristics of the ring vibration gyroscope, such as symmetrical resonant structure, high sensitivity, excellent temperature performance and anti-interference ability. The stiffness coefficient and natural frequency of ring resonator are necessary parameters for gyroscope structure optimization, mode control and circuit design. In order to calculate these resonator parameters, a theoretical model of the ring resonant structure's equivalent stiffness and natural frequency is derived according to the principle of angle sensitivity, material properties and mechanical vibration characteristics of the resonant structures. The finite element analysis simulation and the prototype frequency response test are carried out respectively, and the results show that the inherent frequency of the theoretical model is 7.0820% difference from that by the finite element analysis, and is 3.9035% difference from that of the actual test, which proves the correctness of the theoretical model and provides a theoretical basis for the further study of the gyroscope.