“集成电路工艺原理”课程教学实践环节的探索

摘要

For the shortage of IC experimental facilities in universities,this paper explores the teaching methods and means for the course of IC Processing Principles.It shows that,this teaching method has a-chieved very effective results on students′ability including solving problems and understanding of theories.%针对学校大型实验设备不足的现状，探索了“集成电路工艺原理”课程的实践教学手段和方法。长期教学实践活动表明，开设重点实验和采用工艺模拟软件等教学手段能有效地达到提高学生综合实践能力的教学目的，更有利于学生就业和进一步深造。