探针对原子力显微镜成像的影响

摘要

AFM plays an important role in imaging feature size of samples with micro/ nano-scale. But as the interac-tion between the probe and sample,the image is usually a combination of them,and it is just an approximate descrip-tion of the sample. This paper the images of a fixed sample with probe of different shapes and sizes are presented,the data is compared and the results are concluded. Simulations and experiments demonstrate that the probe should be cho-sen properly to image based on the scale of different samples.%原子力显微镜（Atomic Force Microscope，AFM）的一个重要应用就是对样品表面的微纳米级尺寸特征进行成像，但在扫描成像的过程中，由于针尖的影响作用，使得扫描所获图像是原子力探针和样品共同作用的结果，而不是样品形貌的真实描述。本文通过用具有不同形状、尺寸针尖的探针对同一样品进行成像，将所得图像进行分析、对比，模拟和实验结果表明，为获得更准确的特征尺寸成像，对有不同特征尺寸的样品，需要选择适合的探针对其实施成像。