无定形Si-C-O-N涂层的光学性能研究

摘要

利用射频磁控溅射法,在SSiC陶瓷表面沉积一层无定形Si-C-O-N涂层,测试了抛光后的涂层和SSiC陶瓷在不同波段的反射率情况.结果表明:在软X射线波段,涂层的反射率小于SSiC陶瓷；在EUV波段,两者反射率基本相当；在UV-VIS-NIR波段,涂层的反射率优于SSiC陶瓷.这主要归因于表面粗糙度和涂层中氧元素对反射率共同作用的结果.%Amorphous Si-C-O-N coatings were deposited by RF magnetron sputtering on SSiC ceramic substrates. The reflectance of polished coatings and SSiC in various wave ranges was measured. The results show that the reflectance of coatings is lower than that of SSiC in soft X-ray. The reflectance of coatings is equal to that of SSiC in EUV. The reflectance of coatings is higher than that of SSiC in UV-VIS-NIR. This is attributed to the contribution of both surface roughness and oxygen in coating to the reflectance.