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A process for the preparation of a component with a coating of amorphous carbon, and with amorphous carbon coated component

机译:一种制备具有无定形碳涂层的组分和具有无定形碳涂层组分的方法

摘要

A process for the preparation of a component with a coating of amorphous carbon comprising the steps of:a) etching the surface of a substrate (1) or a on the substrate (1) provided in the ceramic layer and forming a metallic intermediate layer (2) on the substrate (1), or of the ceramic layer, wherein the intermediate layer (2) at least one element from one of the groups iva, va, via and iiib, wherein the ceramic layer is a nitride, a carbide or carbonitride of at least one element of the groups iva, va, via and iiib, wherein the etching and the layer formation by means of applying a negative voltage of not less than 300 v and not more than 1500 v to the substrate (1) in the case of a pressure of the atmosphere of not more than 0,133 pa and by irradiating the surface of the substrate (1), or of the ceramic layer with ions of at least one, the metallic elements forming the intermediate layer (2); andb) forming an amorphous carbon layer (3) by means of a vacuum - light arc deposition on the metallic intermediate layer (2), wherein the metallic intermediate layer (2) during the formation of the amorphous carbon layer (3) is converted into a carbide-containing intermediate layer, characterized in that the carbide-containing intermediate layer with a thickness of 0,5 nm or more and less than 5 nm forms.
机译:一种制备具有无定形碳涂层的部件的方法,该方法包括以下步骤:a)蚀刻设置在陶瓷层中的基板(1)或a在基板(1)上的表面并形成金属中间层( 2)在衬底(1)或陶瓷层上,其中中间层(2)选自iva,va,via和iiib组中的至少一种,其中陶瓷层是氮化物,碳化物或iva,va,via和iiib组中至少一个元素的碳氮化物,其中,通过向衬底(1)施加不小于300 v且不大于1500 v的负电压来进行蚀刻和形成层在大气压力不大于0,133 pa的情况下,通过用至少一种离子辐照衬底(1)或陶瓷层的表面,形成中间层(2)的金属元素; b)通过真空-电弧沉积在金属中间层(2)上形成非晶碳层(3),其中在形成非晶碳层(3)的过程中金属中间层(2)转化为1.一种含碳化物的中间层,其特征在于,形成厚度为0.5nm以上且小于5nm的所述含碳化物的中间层。

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