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Characterization of fracture toughness in amorphous diamond like carbon thin films and coatings

机译:非晶态金刚石(如碳薄膜和涂层)的断裂韧性表征

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摘要

Any material when under application is subjected to constant loading will fail eventually, sometimes this failure can be slow and sometimes it can be instant. It is very important to know that how long a material can withstand loading without failing after the crack has initiated in the material. This ability of a material to withstand loading after a induced crack is known as fracture toughness. It is observed that ductile materials show highest fracture toughness where as brittle materials fails instantly once the crack has initiated.;Characterization of fracture toughness in ductile materials is very easy but it is difficult when dealing with brittle materials and brittle thin films. As the coating thickness of materials decreases and becomes thinner then ∼1 microm it becomes increasingly difficult to evaluate the fracture toughness using conventional methods, since it is not possible to machine this thin films when attached to substrate material.;Micro and Nano-Indentation technique is proposed for such cases where conventional tension test and impact test fails to evaluate the fracture toughness. Indentation techniques are very well developed for hardness measurement in all types of materials. In this paper we will be focusing towards characterizing of fracture toughness in brittle Single Crystal Silicone and Diamond like carbon films coated on Silicone substrate. Such DLC thin films are designed to enhance thermal, oxidation, corrosion and mechanical resistance of substrate materials, however sometimes service lifetime of such coatings in application are limited by their fracture resistance or fracture toughness of coating material. Indentation is a easy, inexpensive, and non-destructive method for mechanical characterization for small volume of material made using three sided and four sided diamond tip like Vickers and Cube-Corner, where we analyze the radial cracks found around indentation to characterize the fracture toughness.;Presence of DLC coating reduces the radial crack length compared to crack length observed in uncoated Silicone. Different Indentation models are used for characterization of fracture toughness suitable for DLC thin films and Silicon wafer is carried out using those radial crack. Most Challenging part of this research was to understand the effect of substrate on thin film and a way to evaluate the fracture toughness of thin film without influence of substrate.
机译:在应用中,任何材料承受恒定载荷都会最终失效,有时这种失效可能很缓慢,有时甚至是瞬间的。重要的是要知道,在材料中产生裂纹之后,材料可以承受多长时间的载荷而不会失败。材料在诱发裂纹后承受载荷的这种能力称为断裂韧性。观察到,韧性材料显示出最高的断裂韧性,其中,一旦产生裂纹,脆性材料立即失效。;韧性材料的断裂韧性的表征非常容易,但是在处理脆性材料和脆性薄膜时却很难。随着材料涂层厚度的减小并变薄,然后减小到约1微米,使用常规方法评估断裂韧性变得越来越困难,因为当附着在基材上时无法加工该薄膜。微米和纳米压痕技术建议在常规拉伸试验和冲击试验无法评估断裂韧性的情况下使用。压痕技术已经非常完善地用于各种类型材料的硬度测量。在本文中,我们将集中于表征脆性单晶硅树脂和类金刚石碳膜涂覆在硅树脂基底上的断裂韧性。此类DLC薄膜被设计成增强基底材料的耐热性,抗氧化性,抗腐蚀性和机械抗性,但是有时这种涂料在应用中的使用寿命受到涂料的抗断裂性或断裂韧性​​的限制。压痕是一种简单,便宜且无损的机械表征方法,适用于使用三面和四面菱形尖端(如维氏和立方角)制成的少量材料进行机械表征,我们在其中分析压痕周围的径向裂纹以表征断裂韧性与未涂覆的有机硅中观察到的裂纹长度相比,DLC涂层的存在减少了径向裂纹长度。使用不同的压痕模型表征适用于DLC薄膜的断裂韧性,并使用这些径向裂纹进行硅晶片加工。这项研究最具挑战性的部分是了解基材对薄膜的影响,以及在不影响基材的情况下评估薄膜断裂韧性的方法。

著录项

  • 作者

    Parmar, Ronaksinh.;

  • 作者单位

    The University of Texas at Arlington.;

  • 授予单位 The University of Texas at Arlington.;
  • 学科 Engineering.;Mechanical engineering.
  • 学位 M.S.
  • 年度 2015
  • 页码 74 p.
  • 总页数 74
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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