聚二甲基硅氧烷气动微型蠕动泵制作工艺的研究

摘要

聚二甲基硅氧烷(PDMS)气动微型泵由3个PDMS气动微阀构成,依靠3个微阀的蠕动作用实现输运液体的作用.PDMS气动微泵的关键制作工艺是液体通道的弧形化和PDMS层之间、PDMS层与玻璃基片之间的封接.实验证明AZ4620正性光刻胶所制作的阳模能形成剖面形状呈弧形的液体通道.采用等离子体氧化处理法封接技术实现了PDMS层之间、PDMS层与玻璃基片之间的封接,该工艺易操作,封接速度快,而且封接效果好.%A polydimethyl siloxane (PDMS) pneumatic micropump is constituted of three active pneumatic micro-valves , and the transport of liquid is realized by Peristaltic working of three valves.Major factors in the fabrication of PDMS pneumatic micropumps are the formation of arc-shaped channel profiles of the liquid channel and bonding PDMS layers as well as bonding between the PDMS layer and the glass slide.AZ4620 positive photoresist was demonstrated the best performance as a positive master for producing a liquid channel with an ideal cross sectional profile.The bonding following plasma cleaning showed the best result was used as the bonding means for fabricating PDMS pneumatic micropumps.This process was demonstrated easy to operate,fast to bond.