变耦合系数型时栅位移传感器后期处理新方法

摘要

Time-grating with variable coupling coefficient can be affected greatly by gear-harmonic in addition to excitation-harmonic because of its quite dependence on stator-and rotator-tooth, and the concomitant is thai standing waves which are superposed to a traveling wave do not fluctuate as a sine-form. Primitive method of direct superposition of standing waves leads to non-sine-form error in the traveling wave. This paper proposed a new method and both simulative and experimental results show effectiveness in solving the problem above and restraining the common-mode interference in standing waves.%由于变耦合系数型时栅对于定子齿和动子齿的依赖性比较大,所以该类型时栅除受激励谐波影响外还要受齿谐波的较大影响,其结果为合成行波的驻波并非呈标准正弦形式变化,而将驻波直接叠加的原始方法会将这种非标准正弦的误差带进行波.文中介绍了一种新的后期信号处理方法,仿真与实际实验表明,新方法不但可以解决上述问题,而且还可以抑制两路驻波中的共模干扰.