大范围快速AFM的高速高精度控制系统

摘要

针对原子力显微镜难以同时实现快速、高精度、大范围扫描成像的不足，逐渐出现了带两级扫描器的原子力显微镜。基于自行研制的大范围快速原子力显微镜（含两级扫描器），为其设计了一种以DSP＿FPGA为核心的高速高精度控制系统。包括DSP和FPGA间数据传输模式和相互配置等关键技术的设计，然后嵌入PI控制器，最后用实验验证了控制系统的有效性。%As the atomic force microscopy is difficult to achieve high-speed , highp-recision and large -range scanning simulta-neously , some atomic force microscopes with two-stage scanner appear gradually .Based on the large-range and highs-peed atomic force microscopy ( including two scanners) developed by our laboratory ,a high-speed high-precision control system using DSP_FP-GA as the core was designed.For crucial designs,the data transfer mode and mutual configuration between DSP and FPGA were presented in details .Then PI controller was implemented to validate the efficiency of this control system .The improved performance of the new control system was experimentally demonstrated finally .