反射式光纤位移传感器的实验与研究

摘要

To solve the problem that it was improper to take the method of contact measurement when some workpiece surface is measured,a non-contact measurement device was designed based on fiber-optic displacement sensor.In accordance with the prin-ciple of optical fiber reflective modulation,the device adopted the precision fine-tuning platform as a tool to displace and adjust. Through using the electronic circuit and software to deal with the output signal of the sensor for secondary processing and calculat-ing,the relationship between the output and the displacement was calculated so as to realize the non-contact measurement of the surface displacement.Experiments show that the fiber-optic sensor is suitable for various non-contact displacement measurement by characterizing with stable performance,high measuring precision and good linearity.Under the relationship of linear between output and displacement,the linearity of this device can be up to plus or minus 3.06% and plus or minus 1.15% lagging within the scope of 1 mm.%为了解决在检测工件表面时,某些工件不宜接触测量的问题,设计了一种基于光纤位移传感器的非接触测量装置.该装置根据光纤反射调制原理,采用精密微调平台作为位移调整工具,利用电子电路和软件对传感器的输出信号进行二次处理,经计算后得出输出量与位移量的关系,从而实现零件表面位移量的非接触测量.实验表明:该光纤位移传感器性能稳定、测量精度高、线性度良好,在1mm范围内其输出基本与位移成线性关系,线性度可达±3.06%,迟滞可达±1.15%,适于非接触的各种位移量的测量.