针对目前高精度倾角测量领域中测角量程偏小的问题,利用重力摆原理设计了一种光栅倾角传感器.首先简述了传感器的测量原理,对内部机械部件与光电部件进行了选型与参数计算;其次结合光栅信号特征,设计了差分放大与整形调理电路,并从信号噪声与制造安装两方面进行了本体误差分析;最后通过实验验证了传感器的测量效果.实验结果表明:传感器具有较好的测量精度,经四倍电子学细分后,测量分辨率达到0.25 mil,能够满足工程应用要求.%For problem about small angle measuring range in high-accuracy angle measuring fields,a kind of grating angle sensor based on gravity pendulum principle was designed.Firstly the measuring principle of sensor was introduced,the mechanical components and light-electric components inside were rade calculation and selection.Then the differential amplifier circuit and reshaping circuit were designed according to grating signal characteristics,and the natural error was reckoned from aspects on signal noise and structure installation.Finally the actual measuring effect was tested by experiment.Results show that the sensor can achieve great measurement precision,the final measurement resolution reached 0.25 mil after forth electronic subdivision,which satisfies the engineering application requirement and posseses high practical value.
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