微桥膜换能元结构设计及电阻计算方法

摘要

针对微结构换能元设计的规范化问题,从解析几何的基本原理出发,建立微结构换能元参数化结构设计方法,获得不同结构微换能元上、下边界的数学表达式.同时借助于单元离散的基本思想,将微结构换能元离散成有限数量个近似方形的微小单元,依据串、并联电阻值计算方法,建立微结构换能元电阻值分析计算模型,并验证了模型准确性.结果表明,菱形和圆弧边界换能元的电阻值随宽度w、特征角度β或特征半径Rc增加呈幂函数形式减小,随长度l增加呈幂函数形式增加.本研究为换能元的结构设计提供技术支撑.%Based on the basic principles from analytic geometry, a parametrized structural design approach was presented to achieve the standardization design for micro-heater, and the shape of micro- heater was described by two mathematical boundary formulas. The micro-heater was firstly divided into amount of approximate-square elements by the aid of discrete element ideology. A resistance analytical model for micro-heater was then built and validated to be deviated less than 5% from the experiment and the references. The resistance vs structure relationships have been investigated to show that the resistance of diamond-boundary and circle-boundary micro-heater decreases with the increasing of the width w, angle β or radius Rc, and increases with the increasing of the length l of micro-heater. The study provides reference for structural design of micro-heater.