CCD靶面与安装定位面夹角误差的光学检测方法

摘要

With the increasing demand of the large-scale array CCD, the angle error between the target surface and mechanical installing surface is rather big in some new researched CCDs, but there is no relevant data in CCD product specifications. This paper introduces a non-contact optical measuring method, detailed explains the principle, operation method and data processing with an example. As a measuring method for new CCD parameters, this method avoids concurrence of real image and virtual image after the optical system was completely adjusted.%随着大尺寸面阵CCD需求增多,一些新研制的CCD产品中靶面与机械安装定位面有较大夹角误差问题,而CCD产品技术说明中不给出相应数据.介绍一种非接触式光学检测方法,并以实例从原理到操作方法及最后的数据处理作了详细的介绍.其作为新购置CCD产品参数的一种检测方法,避免了CCD与光学系统装调完成后图像虚实同时存在的问题.