激光直写变剂量曝光制作菲涅尔透镜研究

摘要

This paper utilizepolar coordinatelaser direct writing system, with variable exposure dose-implemented method of making a focal length of the refractive index n = 1.512 of K9 glass f = 100mm, tooth height of 0.79um, zone radii are 284.6um , 402.5um, 493.0um, 569.2um, 636.4um Fresnel lens respectively, confirmed that the feasibility and practicality of using optical glass to make Fresnel lens.%本文利用极坐标激光直写系统，采用变剂量曝光的方法实现了在折射率 n=1.512的 K9玻璃上制作一焦距为 f=100mm，齿高为0.79um，环带半径分别为284.6um、402.5um、493.0um、569.2um、636.4um 的菲涅尔透镜，证实了利用光学玻璃制作菲涅耳透镜的可行性及实用性。