多晶硅还原炉能耗分析

摘要

In the improved Siemens process , the polysilicon CVD was the core equipment , its energy consumption directly affects the production of polysilicon cost , so it was very meaningful and necessary to study its energy consumption in the production process.To combining the material balance and the energy balance , the energy consumption of the different type furnace of polysilicon CVD was analyzed , and how to manufacture more energy -saving CVD and to select the CVD model was advised.%多晶硅还原炉作为改良西门子法生产多晶硅的核心设备，其在生产过程中的能耗直接影响着多晶硅的生产成本，研究其在生产过程中的能耗去向是非常有意义和必要的。本文结合物料平衡和能量平衡，理论分析了不同炉型的多晶硅还原炉的能量去向，为制造更加节能的还原炉和工业生产过程中还原炉的选型提供了一些思路。