多晶硅生产中SiCl4氢化工艺进展

摘要

In the methods of producing polysilicon,the modified siemens method is the most widely used method,as its many advantages,such as higher security,higher deposition rate and higher purity,etc. SiHCl3deoxidization process and SiCl4hydrogenation process are two key technologies,as well as the main energy dissipation department. At present, our enterprise advocates the energy-saving and cost-reducing production, and environmental protection. On the background,how to raise the conversion rate of SiCl4hydrogenation was investigated.%多晶硅生产方法中,改良西门子法由于安全性好、沉积速率高、纯度较高等优点,成为目前应用最广泛的工艺.其中SiCl4氢化制备SiHCl3工艺,是其中一项关键技术,也是多晶硅生产中耗能较多的工序.在国家提倡节能降耗、生态环保的背景下,如何提高SiCl4氢化转化率,提高产量和质量,降低能耗,意义重大.本文针对这个问题,对目前的各种氢化技术进行了对比研究,发现催化氢化中的氯氢化技术节能降耗最显著,综合指标好,是有前景的氢化技术.