I/V特性扫描在静电放电试验中的应用

摘要

随着超大规模集成电路工艺的高速发展，特征尺寸越来越小，而静电放电（Electrostatic Discharge）对器件可靠性的危害变得越来越显著。因此，静电放电测试已经成为对器件可靠性评估的一个重要项目。I/V特性扫描是静电放电试验中必不可少的一环。文章介绍了I/V特性扫描的目的、波形、程序、扫描过程中遇到的问题和应用。%The character dimension is smaller and smaller by the development of VLSI process. So the damage of electrostatic discharge is more markedly in the MOS device’s reliability. Therefore, the test of electrostatic discharge has already been an important item in the evaluation of the MOS device’s reliability. I/V characteristic scans are the essential part of electrostatic discharge test. This paper will show scanning purposes, waveform, programs, the problems encountered during the scan and scanning applications.