钟形陀螺采用压电激励实现四波腹振动，通过检测振子边缘振幅以获取输入角速率。在其量程内的振子边缘振幅为120 nm左右，为实现对微纳振幅检测，将钟形陀螺振子边缘设计成曲面电容结构；采用有限元方法，对曲面电容结构进行仿真；在仿真结果基础上对微电容进行检测。结果表明：在极板面积为9π/4mm2、厚度为0.1mm、电极最小间距30μm时，钟形陀螺曲面电容结构可等效为平板电容器，固有容值为2 pF级别；可敏感120 nm的微纳振幅，容值变化为0.01 pF级别；曲面电容检测方法能够实现钟形陀螺微纳振幅检测。%Bell vibratory gyro uses piezoelectric excitation to achieve four troughs vibration and obtain the input angular rate by detecting the amplitude of the vibrator. The amplitude of the vibrator is about 120 nm within the range,and the structure of the bell vibrator is designed as curved surface capacitor for the realization of the micro-nano amplitude detection. The structure is simulated through finite element method;the micro-capacitance is detected based on the simulation results. According to the results, as the capacitor plate area being 9π/4 mm2 , thickness being 0. 1 mm,and the minimum distance being 30 μm,the curved surface capacitor can be equivalent to a parallel plate one,and the capacitance is at the level of 2 pF. The value of the capacitance change is at the level of 0. 01 pF,by what the micro-nano amplitude of 120 nm can be sensitive,and the curved surface capacitor can be realized to detect the micro amplitude of the bell vibratory gyro.
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