基于高温烧结氧化铝陶瓷的无线无源温度传感器

摘要

A wireless passive temperature sensor based on Alumina ceramic is designed and fabricated,where the alumina ceramic substrate is obtained with the overall size of 28 mmí28 mmí0 . 47 mm through high temperature sintering technology,and passive LC series resonant circuit is printed on the substrate by thick film technology. A wireless test on the sensor is achieved under the temperature from 18 ℃ to 300 ℃. The results show that the temperature sensor demonstrates good linear characteristics, large linear range and low non-linear error. The sensitivity of the sensor on resonant frequency to temperature is about 2 . 75 kHz/℃. It can be applied to detect high temperature in harsh environments.%通过高温烧结技术获得了总体尺寸为28 mm×28 mm×0.47 mm的氧化铝陶瓷基板,结合厚膜技术在该基板上印刷无源LC串联谐振电路,设计并制备了一种基于氧化铝陶瓷的无线无源温度传感器。在18℃~300℃的温度范围内实现了传感器的无线测试,测试结果表明该温度传感器呈现出了良好的线性特征,线性范围大且非线性误差小,其谐振频率对温度的灵敏度约为2.75 kHz/℃,可应用于高温恶劣环境下的温度检测。