氧化铝陶瓷基无线无源压力传感器的高温性能研究

摘要

利用高温烧结陶瓷技术制备了一种基于氧化铝陶瓷的LC谐振式无线无源压力传感器,并通过合理地设计圆柱螺旋天线以及隔热结构,实现了该传感器在高温环境中的无线耦合测试。研究了传感器在不同温度下的阻抗频率特性,分析并探讨了传感器的高温性能。测试结果表明,在29℃(室温)至700℃的温度范围内,测试天线端的最高瞬时温度为188.4℃,保证了传感器高温测试的可靠性。谐振频率对温度的平均变化量为1.314 kHz/℃,两次重复性测试的相对变化量为3.81%,重复性较好。该压力传感器可应用于高温恶劣环境下的压力测试,其高温性能的研究为压力信号的准确读取奠定了良好的基础。%A wireless passive LC resonant pressure sensor based on alumina ceramic is fabricated by the high tem-perature sintering ceramic process,and cylindrical helical antenna and a structure of insulation material are designed to realize the wireless coupling test for the sensor in high temperature environment. The high temperature perform-ance of the sensor is analyzed and discussed by studying the impedance-frequency characteristics under different temperatures. The results show that the highest instantaneous temperature of the terminal of the test antenna is 188.4℃ when the temperature is ranged from 29℃( room temperature) to 700℃,which ensures the reliability of the test on the sensor under high temperature. The average change of resonant frequency to temperature is 1.314 kHz/℃, and the relative change of the twice tests is 3.81%,with good reproducibility. The pressure sensor can be used to measure the pressure under high temperature and harsh environment,and the study of the high temperature perform-ance of the sensor laid a good basis for accurately reading the pressure signal.