微型双模式耐蚀压力传感器设计及特性分析∗

摘要

This paper presents the analytical modeling of a novel micro dual￣mode pressure sensor which is capable of measuring static and transient pressure simultaneously under corrosive environment. The sensor is compromised of a LTCC￣based( low temperature co￣fired ceramic) piezoresistive measurement unit and a PDMS￣based( polydimethyl￣siloxane) capacitive measurement unit. The use of piezoresistive unit is to accomplish static pressure measurement,while the capacitive measurement unit realizes transient pressure measurement. Mathematical models of the proposed piezoresistive and capacitive transduction were calculated respectively. FE analyses were also performed to help in assessing the impacts of sensor structure on measurement characteristics in the prototyping explore.%本文提出一种微型双模式耐蚀压力传感器设计并分析其测试特性，能够实现静态力和瞬时力的同步测量。该传感器由基于低温共烧陶瓷的压阻测量单元和基于硅橡胶的电容测量单元构成。并由压阻测量单元实现静态力的测量，电容测量单元实现瞬时力的测量。文中分别计算了压阻测量单元和电容测量单元的数学分析模型，并通过有限元仿真研究传感器的静态特性和模态响应，考量传感器结构参数对其测量性能的影响。