铝钛共掺杂氧化锌透明导电薄膜的制备与性能研究

摘要

用直流磁控溅射法在玻璃衬底上成功制备出了铝钛共掺杂氧化锌(TAZO)透明导电薄膜,研究了溅射压强对TAZO薄膜的微观结构和光电特性的影响.研究结果表明,所制备的TAZO薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向.当溅射压强为7.5 Pa时,薄膜的最小电阻率为3.34×10-4Ω·cm.薄膜的可见光区平均透过率大于89%.溅射压强对薄膜的电阻率和微观结构有显著影响.%Transparent conducting Al-Ti co-doped zinc oxide films have been successfully prepared by DC magnetron sputtering.Microstructural, optical and electrical properties of TAZO films are investigated.The experimental results show that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrates along the c-axis.When the sputtering pressures is 7.5 Pa， the lowest resistivity is 3.34×10-4 Ω · cm.All the films present a high transmittance of above 89％ in the visible range.The sputtering pressures plays an important role on the microstructure and electrical resistivity of TAZO films.