微型电磁继电器的仿真与加工工艺研究∗

摘要

设计了一种新型的MEMS微型继电器,该继电器采用电磁驱动方式,继电器大小约为1.2 mm×1 mm×1 mm,驱动力大、体积小、便于集成。用ANSYS和MATLAB仿真分析各参数对微继电器性能的影响,对其进行优化分析和理论验证。该微型继电器能产生最大60 mN左右的驱动力,实现30μm的驱动行程,满足性能要求。运用UV-LIGA技术,完成工艺的流程设计。通过反复实验,提出了增强金属与基底的粘附性的有效方法。%A new kind of MEMS micro relays is designed which driven by electromagnetic force. The relay size is about 1.2 mm×1 mm×1 mm with large driving force,small size,ease of integration. ANSYS and MATLAB are used to simulate and analyze the influence of various parameters on the micro relay performance, and optimize the analysis and verify in theory. The micro relay can produce the greatest driving force of about 60mN, the driving range of 30 μm and meet the performance requirements. UV-LIGA technology is used to finish process design. By repeating experiment,an efficient method is presented to enhance the adhesion between the metal and substrates.