Aiming at the problems of terminal residual vibration suppression of a 3-DOF parallel manipulator with limbs of embedding structures,an active suppression method was proposed based on the classical positive impulse input shaping combined with the optimal S-curve profile.Firstly,using the Lagrange method a rigid-flexible coupling dynamics model was built for the parallel manipulator with limbs of embedding structures,which consisted of the rigid rod and the flexible components,and then through the dynamic characteristic analyses,it was confirmed that the influences on the residual vibration most were the low order modal.After that,resonant frequency and damping ratio were ob—tained through experimental analyses and simulations,and based on the residual attenuation vibration model of the linear second-order owed damping system that affected by impulse sequence,changing the input signals of the drive through feedforward positive impulse input shape combined with the op—timal S-curve profile,so as to achieve active suppression of the terminal residual vibration of the paral—lel manipulator with limbs of embedding structures.The experimental results show that the chain nes—ted residual vibration attenuation time of the end of the parallel robot is reduced by 57·14%,the max—imum amplitude is reduced by 22%,the positioning accuracy and trajectory precision are improved in the process of high speed and high precision wafer handling.%针对三自由度支链嵌套可连续回转并联机器人末端残余振动问题，提出了基于经典正脉冲输入整形和最优S形轨迹曲线相结合的主动控制方法。首先采用拉格朗日法对刚性杆柔性部件组成的支链嵌套并联机器人进行刚柔耦合动力学建模，并通过动态特性分析确定对末端残余振动影响较大的低阶模态。结合实验分析和仿真获得共振频率和阻尼比，并根据线性化二阶欠阻尼系统在脉冲序列作用下的残余衰减振动模型，采用前反馈正脉冲输入整形与最优 S形轨迹曲线相结合来改变驱动器的输入信号，从而达到对支链嵌套并联机器人末端残余振动的主动抑制。最后通过实验和数值分析对该方法进行了验证。实验结果表明，应用该方法后此种支链嵌套并联机器人末端残余振动的衰减时间缩短了57·14％，最大振幅降低了22％，有效提高了并联机器人在高速高精度硅片搬运过程中的定位精度和轨迹精度。
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