N 型重掺杂硅微细电火花加工试验研究*

摘要

采用 N 型重掺杂硅作为微细电火花加工对象，通过选择不同电参数（空载电压120V、160V，脉宽0.25滋s、2.5滋s），进行对比试验，并采用 SEM 方法对工件表面及加工产物的形貌进行表征和分析，研究不同脉冲能量（最小放电脉冲能量约10-7J）对加工表面及产物的影响。试验结果表明，随着单个脉冲能量的减小，放电凹坑和加工产物尺寸显著减小，加工表面质量有所提高。%　　The N -type heavy -doped silicon ingot is selected to be machined by using micro -EDM. In comparison to different electrical parameters (open voltage is 120V,160V, and pulse duration is 0.25μs, 2.5μs), the surface morphology and byproducts have been characterized and analyzed by using SEM method, and to find the influences of introducing different pulse energy (the minimum discharge pulse energy is about 10 -7J). The experiment results show that with the decrease of single pulse energy, the size of discharge crater and the debris are significantly reduced, and the surface quality is improved.