Fe80Ni20 thin films with different thickness values are prepared by the molecular beam vapor deposition technique, respectively, in the cases with applying no magnetic field and with applying a 6 T magnetic field perpendicular to the surface of substrates. Film property studies show that as film thickness value increases, the coercive force in-plane decreases, which is in accordance with Neel theory, and that the squareness ratio first quickly increases, and then slowly decreases. The 6 T magnetic field restrains coalescence and abnormal growth of grains, and reduces surface roughness. Therefore, with 6 T magnetic field applied during the film preparation, the coercive force of thin film is less and the squareness ratio is larger than that with no magnetic field applied. The thin films are anisotropic in-plane with applying no magnetic field, but isotropic with applying a 6 T magnetic field.%有无6 T强磁场条件下利用分子束气相沉积方法制备了不同厚度的Fe80Ni20薄膜。研究发现,薄膜的面内矫顽力随厚度增加而降低且符合Neel理论;矩形比随厚度的增加先快速增大后缓慢降低;6 T磁场抑制了颗粒团聚及异常长大,并降低了薄膜表面的粗糙度,这使薄膜的矫顽力要小于无磁场作用的薄膜,矩形比大于无磁场作用的薄膜;而且薄膜在垂直于基片表面的6T磁场作用下由0T下的面内磁各向异性转变为磁各向同性。
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