为了研究脉冲等离子体推力器羽流污染特性,把握脉冲等离子体推力器羽流沉积薄膜性质,利用质谱仪对推力器羽流残余气体成分进行了分析,利用红外傅里叶光谱、光电子能谱及紫外可见光分光光度计对推力器羽流区阴极侧不同方位角处沉积薄膜的结构及光学性质进行了诊断研究结果表明,推力器羽流中主要存在C,F,CF,CF2和CF3气体分子;在各方位角处脉冲等离子体推力器羽流沉积生成了低氟碳比碳氟薄膜;沉积薄膜微观结构以30°角为界在羽流不同区域中具有不同的变化趋势;羽流沉积薄膜具有对波长小于500 nm的光低透射率及增强反射率的光学特性,受薄膜性质的影响,其光学特性具有极大的角度依赖性.%In order to study the characteristics of the films deposited by pulsed plasma thruster plume and assess contamination arising from the exhaust plume, the compositions of the pulsed plasma thruster plume are studied by means of mass spectrum analysis, the structural properties of the films deposited at different angles on the cathode side of the thruster are investigated by X-ray photoelectron spectroscopy, Fourier transform infrared absorption spectroscopy, and the optical properties of the films are studied by ultraviolet-visible light spectrophotometry. The results show that the plume consists primarily of C, F, CF, CF2, CF3, that low fluorine-carbon ration carbon fluorine films are deposited by pulsed plasma thruster plume, and that the chemical bondings and structures of these films present different trends in different regions with 30 degree angle as the boundary. These films basically show that they have strong absorption properties for wavelengths below 500 nm and have enhanced reflective characteristics. Due to influence of the characteristics of the deposited films, the optical properties of these films present signigicant angular dependences.
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