Fe-Ni合金薄膜组成表面分析测量国际关键比对CCQM-K67

摘要

Based on X-ray photoelectron spectroscopy technique, the National Institute of Metrology of China developed an accurate analytical method and took part in the CCQM-K67 international key comparison on surface analysis measurement of the composition for Fe-Ni alloy film. According to the recently published comparison results, the measured Fe atom fraction ( 51.48% ) by the National Institute of Metrology of China was agreed with the reference value ( 50. 02% ) of the CCQM-K67 key comparison.%利用X射线光电子能谱技术,建立了Fe-Ni合金薄膜组成表面分析准确定量方法,中国计量科学研究院参加了国际关键比对CCQM-K67.根据最近公布的关键比对结果,中国计量科学研究院测量的Fe原子分数结果为51.48％,与参加的各国国家计量研究院的结果(50.02％)达到了等效一致.