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Alterative methods for fabricating lab-on-a-chip microfluidic platforms.

机译:制造芯片实验室微流体平台的替代方法。

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High temperature bonding and precise alignment are the major limitations in fabricating present day microfluidic devices. The novelty of the proposed research is to fabricate Lab-on-a-Chip (LOC) devices at a low temperature with the added benefit of maintaining precise alignment during the entire bonding process. The LOC devices were fabricated using photomasks as the substrates material and traditional microfabrication technologies like photolithography, wet etching, thin film deposition, and wafer level bonding. A room temperature "Stamp and Stick (SAS)" transfer bonding technique was developed to bond the LOC devices using a suitable UV curable adhesive.; The fabrication limitations encountered during SAS such as webbing, bleeding and non-bonding are addressed. Various adhesive thickness were explored to address the fabrication limitations and a polymer thickness of approximately 1.9 mum obtained at a spin speed of 8000 rpm and spin time of 60 seconds was selected to bond the final devices.; A study to further understand the fabrication limitations was also performed. In the study adhesive wall width, polymer thickness, spin speed, and spin time were varied. Adhesive wall widths of 200 mum and 400 mum were used and the devices were spun at 6000 rpm and 8000 rpm with spin time of 30 seconds and 60 seconds. From the study it was inferred that a polymer thickness of approximately 2-3mum was ideal to bond LOC devices using SAS. Webbing was due to the polymer thickness and the geometry. Bleeding was due to the adhesive wall width excess polymer thickness. Non-bonding was observed due to problems with planarization. However, in these devices, the channels were not clogged and leakage was not seen in these devices.; The fabricated devices were characterized with a mixture of dopamine (2.0mM) and catechol (2.0mM) in a phosphate buffer (20mM) solution. Both separation and detection of the analytes were achieved in the tested LOC devices. All of the eight electrochemical detection (ECD) electrodes in the array were capable of detecting dopamine with the amplitude of the signal (i.e., peak heights) decreasing as the electrodes distance from the channel exit increased. The overall performance of the new SAS LOC devices exceeded that of the previous thermally bonded devices.
机译:高温粘合和精确对准是制造当今微流体装置的主要限制。所提出的研究的新颖性在于在低温下制造芯片实验室(LOC)器件,并具有在整个键合过程中保持精确对准的附加好处。 LOC器件是使用光掩模作为基板材料和传统的微加工技术(如光刻,湿法蚀刻,薄膜沉积和晶圆级键合)制造的。开发了室温“ Stamp and Stick(SAS)”转移粘合技术,以使用合适的紫外线可固化粘合剂粘合LOC器件。解决了SAS期间遇到的制造限制,例如织带,渗出和非粘结。探索各种粘合剂厚度以解决制造限制,并选择在8000rpm的旋转速度和60秒的旋转时间下获得的约1.9μm的聚合物厚度以粘结最终器件。还进行了进一步了解制造限制的研究。在研究中,胶粘剂的壁宽,聚合物厚度,旋转速度和旋转时间都不同。使用200μm和400μm的粘合剂壁宽度,并且将装置以6000rpm和8000rpm旋转,旋转时间为30秒和60秒。从研究中可以推断出,大约2-3μm的聚合物厚度是使用SAS粘接LOC器件的理想选择。织带归因于聚合物的厚度和几何形状。出血是由于粘合剂的壁宽超出了聚合物的厚度。由于平面化的问题,观察到未结合。但是,在这些设备中,这些设备中的通道没有阻塞,也看不到泄漏。用磷酸盐缓冲液(20mM)溶液中的多巴胺(2.0mM)和邻苯二酚(2.0mM)的混合物表征制造的设备。在测试的LOC设备中,分析物的分离和检测均得以实现。阵列中的所有八个电化学检测(ECD)电极都能够检测多巴胺,信号幅度(即峰高)随着电极距通道出口的距离增加而减小。新SAS LOC设备的整体性能超过了以前的热粘合设备。

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