Microfluidic channels fabricated using a lithography-free method

摘要

A lithography-free microchannel fabrication process with controlled pattern is demonstrated via the combination of Near Field Electrospinning (NFES) and molding of polydimethysiloxane (PDMS). Electrospun polymer fibers (1–10µm in width, 0.5–4µm in height) were patterned onto a silicon substrate to serve as the template. Microfluidic devices with parallel and grid-pattern microchannels were created and tested. By adjusting the electrospinning parameters, control of microchannel size was achieved. This methodology offers an effective, yet simple alternative way to lithography-based techniques for fabricating on-chip fluidic networks in MEMS, IC and biological fields.