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DIGITAL MICROFLUIDIC DEVICE, MICROFLUIDIC APPARATUS, LAB-ON-A-CHIP DEVICE, DIGITAL MICROFLUIDIC METHOD, AND METHOD OF FABRICATING DIGITAL MICROFLUIDIC DEVICE
DIGITAL MICROFLUIDIC DEVICE, MICROFLUIDIC APPARATUS, LAB-ON-A-CHIP DEVICE, DIGITAL MICROFLUIDIC METHOD, AND METHOD OF FABRICATING DIGITAL MICROFLUIDIC DEVICE
A digital microfluidic device includes a thin film transistor driving substrate. The thin film transistor driving substrate includes a first base substrate; a plurality of sample actuating units; a plurality of sample position detecting units; a dielectric insulating layer on a side of the plurality of sample actuating units and the plurality of sample position detecting units distal to the first base substrate; and a first hydrophobic layer on a side of the dielectric insulating layer distal to the first base substrate. Each of the plurality of sample actuating units includes a first electrode configured to drive transportation of a liquid droplet on the digital microfluidic device. Each of the plurality of sample position detecting units includes a photosensor configured to detect presence or absence of the liquid droplet on a position corresponding to the photosensor.
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