Digital microfluidic device, microfluidic apparatus, lab-on-a-chip device, digital microfluidic method, and method of fabricating digital microfluidic device

摘要

A digital microfluidic device includes a thin film transistor driving substrate. The thin film transistor driving substrate includes a first base substrate; a plurality of sample actuating units; a plurality of sample position detecting units; a dielectric insulating layer on a side of the plurality of sample actuating units and the plurality of sample position detecting units distal to the first base substrate; and a first hydrophobic layer on a side of the dielectric insulating layer distal to the first base substrate. Each of the plurality of sample actuating units includes a first electrode configured to drive transportation of a liquid droplet on the digital microfluidic device. Each of the plurality of sample position detecting units includes a photosensor configured to detect presence or absence of the liquid droplet on a position corresponding to the photosensor.