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ZnO Nanostructures and Thin Layers for Device Applications

机译:用于器件的ZnO纳米结构和薄层

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摘要

An overview of our nanostructures and thin layers fabrication technologies including MOCVD, vapour phase transport, MBE, chemical growth, electrodeposition is presented. The developed technologies provide control on the nanopillar characteristics, and still leaving the self-organisation mechanism untouched. Also fabrication of complicated heterostructures like quantum wells both as epitaxial layers or embedded into nanopillars was demonstrated. First results of the device applications of ZnO nanostructures as well as implementation of alternative ZnO nanostructures like nanopowders are discussed.
机译:概述了我们的纳米结构和薄层制造技术,包括MOCVD,气相传输,MBE,化学生长,电沉积。所开发的技术可控制纳米柱的特性,并且仍然保持其自组织机制不变。还展示了复杂的异质结构的制造,如既作为外延层又嵌入纳米柱的量子阱。讨论了ZnO纳米结构的器件应用以及替代性ZnO纳米结构(如纳米粉)的实现的初步结果。

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  • 来源
  • 会议地点 Honolulu HI(US);Honolulu HI(US)
  • 作者单位

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braunschweig, 38106, Germany;

    Institute of Semiconductor Technology, Technical University Braunschweig, Braun;

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  • 正文语种 eng
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